Chamber Lid Beam designed for hold the 10 kg stainless-steel lid of Thin Film Evaporation Coating Machine.
Deformation after loaded by the lid is very important issue for the lid while opening. Basic Finite Element Analysis is applied to beam designing. This beam could achieve under 0.7 mm deform with under yield strength of material.
After beam optimized, the beam constructed by using stainless steel as beam, and the mount between beam and hydrolic piston used machined stain steel connector. The connector and beam joint together by weldment technique.
This beam operated at SimDScience Lab, KMUTT for 2 years without fatique from machine usages.